Improvement of Thermal Stability of SiC Fiber by CVD-C, SiC Coating
نویسندگان
چکیده
منابع مشابه
Fluorinated SiC CVD
For the emerging semiconductor material silicon carbide (SiC) used in high power devices, chemical vapor deposition (CVD) is the most prominent method to create the electrically active SiC epitaxial layers in the device. The process of growing such epitaxial layers is to use a hydrocarbon and silane diluted in hydrogen flow through a hot chamber where chemical reactions take place in such a man...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1991
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.99.1207